The global Semiconductor Parts Cleaning Market was valued at 875 million in 2024 and is projected to reach US$ 1416 million by 2031, at a CAGR of 7.3% during the forecast period.
Semiconductor Parts Cleaning Market OverviewSemiconductor chamber parts cleaning lagged behind the “Ultra-Clean Revolution” which is central in discussing all other semiconductor process inputs (i.e., gases, chemicals and silicon). Every other semiconductor process input has a Certificate of Analysis (COA)?even new parts. However, recycled chamber part cleanliness varies significantly in particle levels and atomic level contamination. This is partly because standard practice used the tools themselves to perform the final cleaning of the parts. Verifying cleanliness targets was achieved by using many test wafers, expensive wafer metrology and wasted production time. Cleaning is a process to remove contaminants such as particles and ionic impurities of equipment parts generated during customers’ process.
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Scope of the Report:This report analyzes the precision cleaning services market for semiconductor chamber parts, covering both used and new components used in processes such as:
- Atomic Layer Deposition (ALD)
- Chemical Vapor Deposition (CVD)
- Physical Vapor Deposition (PVD)
- Etching
- Diffusion
- Ion Implantation
- Lithography
- Quartz components, among others
These services are essential for both semiconductor fabs and OEMs, ensuring process integrity, yield improvement, and equipment longevity.
Major companies operating in the global semiconductor chamber parts cleaning market include:
- UCT (Ultra Clean Holdings, Inc.)
- Kurita (Pentagon Technologies)
- Enpro Industries (LeanTeq, NxEdge)
- TOCALO Co., Ltd.
- Mitsubishi Chemical (Cleanpart)
- KoMiCo
- Cinos
- WONIK QnC
- Frontken (Ares Green Technology Corporation)
- Hung Jie Technology Corporation
- Ferrotec (Anhui) Technology Development Co., Ltd.
- Shih Her Technology
Key Players in Taiwan:
Top companies providing semiconductor parts cleaning services in Taiwan include:
- Shih Her Technology
- Frontken (Ares Green Technology Corporation)
- UCT (Tainan Quantum Technologies)
- Enpro Industries (LeanTeq)
- KERTZ HIGH TECH
- Hung Jie Technology Corporation
- Mitsubishi Chemical Taiwan
- HTCSolar
- KoMiCo
As of 2023, the top six players in Taiwan accounted for approximately 82% of total market revenue, reflecting a highly concentrated market landscape.
The growth of Taiwan’s semiconductor precision cleaning services market is closely tied to the booming IC manufacturing sector, which is being propelled by applications in:
- High-Performance Computing (HPC)
- Smartphones
- Internet of Things (IoT)
- Automotive electronics
- Digital consumer electronics
The surge in AI, data centers, 5G smartphones, and automotive chips is particularly boosting demand for HPC chips, thereby driving cleaning service requirements.
- TSMC is the largest customer of semiconductor parts cleaning services in Taiwan.
- In 2023, TSMC’s advanced nodes (16nm to 3nm) accounted for 68% of its total revenue.
- This share is expected to exceed 75% in 2024, reflecting a shift toward cutting-edge technologies that require even more stringent contamination control and precision cleaning.
According to TSIA and proprietary research:
- 2023 Market Size: USD 86.8 billion
- Projected 2030 Market Size: USD 167 billion
This sustained growth underscores Taiwan’s role as a global semiconductor powerhouse and further amplifies the demand for supporting services such as precision chamber parts cleaning.
Semiconductor Parts Cleaning Key Market Trends :- Rising Demand from Advanced Nodes
As semiconductor nodes shrink to 3nm and below, the need for ultra-clean chamber parts has increased, especially for ALD, CVD, and Etch processes. - Shift from In-house to Outsourced Cleaning
OEMs and fabs are increasingly outsourcing cleaning services to specialists, ensuring higher quality and consistency. - Regional Expansion in Taiwan and China
With TSMC and UMC driving production growth, Taiwan leads the demand for chamber part cleaning, holding over 82% market share in 2023. - Focus on Cleanroom Standards and COA Compliance
There’s a growing push toward standardized cleanliness verification with COA for recycled parts, aligning with the ultra-clean manufacturing trend. - Sustainability and Waste Reduction
As fabs aim to reduce waste and operational costs, the reuse and precision cleaning of expensive chamber parts is gaining momentum. - Total Market by Segment:
- Global Semiconductor Parts Cleaning market, by Type, 2020-2025, 2026-2031 ($ millions)
Global Semiconductor Parts Cleaning market segment percentages, by Type, 2024 (%)- 300mm Equipment Parts
- 200mm Equipment Parts
- 150mm and Others
- Global Semiconductor Parts Cleaning market, by Application, 2020-2025, 2026-2031 ($ millions)
Global Semiconductor Parts Cleaning market segment percentages, by Application, 2024 (%)- Semiconductor Etching Equipment Parts
- Semiconductor Thin Film (CVD/PVD)
- Lithography Machines
- Ion Implant
- Diffusion Equipment Parts
- CMP Equipment Parts
- Others
- Competitor Analysis
The report also provides analysis of leading market participants including:- Key companies Semiconductor Parts Cleaning revenues in global market, 2020-2025 (estimated), ($ millions)
- Key companies Semiconductor Parts Cleaning revenues share in global market, 2024 (%)
- Further, the report presents profiles of competitors in the market, key players include:
- UCT (Ultra Clean Holdings, Inc)
- Kurita (Pentagon Technologies)
- Enpro Industries (LeanTeq and NxEdge)
- TOCALO Co., Ltd.
- Mitsubishi Chemical (Cleanpart)
- KoMiCo
- Cinos
- Hansol IONES
- WONIK QnC
- Dftech
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FAQsQ: What are the key driving factors and opportunities in the Semiconductor Parts Cleaning market?
A: Key drivers include advanced node manufacturing, rising ALD/CVD use, and Taiwan’s IC boom. Opportunities lie in 5G, AI, and Southeast Asian foundry expansions.
Q: Which region is projected to have the largest market share?
A: Taiwan is projected to hold the largest share, driven by leading players like TSMC, with over 82% of the regional market revenue in 2023.
Q: Who are the top players in the global Semiconductor Parts Cleaning market?
A: Key players include UCT, Kurita (Pentagon Technologies), Enpro Industries, TOCALO, Mitsubishi Chemical, KoMiCo, and Frontken.
Q: What are the latest technological advancements in the industry?
A: Recent advances include plasma-based dry cleaning, automation in part handling, and real-time particle contamination detection.
Q: What is the current size of the global Semiconductor Parts Cleaning market?
A: The market was valued at USD 875 million in 2024 and is projected to reach USD 1416 million by 2031, growing at a CAGR of 7.3%.